Add-on Acquisition • Test/Measurement Equipment

Therma-Wave Acquires Sensys Instruments

On December 18, 2001, Therma-Wave acquired test/measurement equipment company Sensys Instruments

Acquisition Context

This is Therma-Wave’s 1st transaction in the Test/Measurement Equipment sector.
This is Therma-Wave’s 1st transaction in the United States.
This is Therma-Wave’s 1st transaction in California.

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M&A Deal Summary
Date	December 18, 2001
Target	Sensys Instruments
Sector	Test/Measurement Equipment
Buyer(s)	Therma-Wave
Deal Type	Add-on Acquisition

Target Company

Sensys Instruments

Santa Clara, California, United States

Sensys Instruments Corp. is a privately held company to develop and commercialize integrated metrology systems for the semiconductor industry. The company has successfully introduced integrated metrology systems for CMP and photo resist coater/developer applications.

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Buyer Overview 1

Buyer

Therma-Wave

Fremont, California, United States

Category	Company
Founded	1982
Sector	Test/Measurement Equipment

DESCRIPTION

Therma-Wave, Inc. is a proprietary process control metrology products and technologies used in the manufacture of semiconductors. Therma-Wave offers edge products for the measurement of transparent and semi-transparent thin films; for the measurement of critical dimension and profile of IC features; and for the monitoring of ion implantation and activation processes.

Deal Context for Buyer	#
Overall	1 of 1
Sector: Test/Measurement Equipment	1 of 1
Type: Add-on Acquisition	1 of 1
State: California	1 of 1
Country: United States	1 of 1
Year: 2001	1 of 1

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